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Chemical Amplification for the Design of Sensitive Electron-Beam and X-ray Resist Systems

著者名:
Ito, Hiroshi  
掲載資料名:
Radiation effects on polymers
シリーズ名:
ACS symposium series
シリーズ巻号:
475
発行年:
1991
開始ページ:
326
出版情報:
Washington, D.C.: American Chemical Society
ISSN:
00976156
ISBN:
9780841221659 [0841221650]
言語:
英語
請求記号:
A05800/475
資料種別:
国際会議録

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