IN SITU AND EX SITU APPLICATIONS OF SPECTROSCOPIC ELLIPSOMETRY

IN SITU AND EX SITU APPLICATIONS OF SPECTROSCOPIC ELLIPSOMETRY

著者名:

Woollam, John A.

掲載資料名:

Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

324

発行年:

1994

開始ページ:

15

出版情報:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992238 [1558992235]

言語:

英語

請求記号:

M23500/324

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017537
シリーズID:	PA00000011
会議名:	Symposium on diagnostic techniques for semiconductor materials processing
回次:	1993
会議開催地:	Boston, MA, USA
会議開催年:	1993.11.29-1993.12.02

類似資料:

1 国際会議録 IN SITU SPECTROSCOPIC ELLIPSOMETRY FOR REAL TIME SEMICONDUCTOR GROWTH MONITOR Johs Blaine, Meyer, Duane, Cooney, Gerald, Yao, Huade, Snyder, Paul G., Woollam, John A., Edwards, John, Maracas, George Materials Research Society	7 国際会議録 IN-SITU MEASUREMENT OF GaAs OPTICAL CONSTANTS AND SURFACE QUALITY, AS FUNCTIONS OF TEMPERATURE Yao, Huade, Snyder, Paul G. Materials Research Society
2 国際会議録 GaAs(100) SURFACE MODIFICATIONS AT ELEVATED TEMPERATURES, STUDIED BY IN-SITU SPECTROSCOPIC ELLIPSOMETRY Yao, Huade, Snyder, Paul G., Woollam, John A. Materials Research Society	8 国際会議録 *VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY (VASE FOR THE STUDY OF ION-BEAM -AND GROWTH MODIFIED SOLIDS Woollam, John A., Snyder, Paul G., Rost, M. C. Materials Research Society
3 国際会議録 IN SITU STUDIES OF ELECTRON CYCLOTRON RESONANCE PLASMA ETCHING OF SEMICONDUCTORS BY SPECTROSCOPIC ELLIPSOMETRY Nafis, S., Ianno, N.J., Snyder, Paul G., Woollam, John A., Johs, Blaine Materials Research Society	9 国際会議録 CHARACTERIZATION OF POLYSILICON THIN FILMS BY VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY Ziong, Yi-Ming, Snyder, Paul G., Woollam, John A., Krosche, Eric R., Strausser, Yale Materials Research Society
4 国際会議録 Variable angle spectroscopic ellipsometry studies of HgI2 Yao, Huade, Johs, Blaine MRS - Materials Research Society	10 国際会議録 REFLECTION OF POLARIZED LIGHT FROM MULTIPLY OVERCOATED MAGNETO-OPTIC MATERIALS: A SIMPLIFIED ANALYSIS METHOD McGahan, William A., Woollam, John A. Materials Research Society
5 国際会議録 TEMPERATURE DEPENDENCE OF OPTICAL PROPERTIES OF AIAs. STUDIED BY IN SITU SPECTROSCOPIC ELLIPSOMETRY Yao, Huade,, Snyder, Paul G., Stair, Kathleen, Bird, Thomas Materials Research Society	11 国際会議録 OPTICAL CHARACTERIZATION AND MODELING OF AMORPHOUS HYDROGENATED CARBON FILMS McGahan, William A., Woollam, John A. MRS - Materials Research Society
6 国際会議録 Recent developments in spectroscopic ellipsometry for in-situ applications Johs,B.D., Hale,J., Ianno,N.J., Herzinger,C.M., Tiwald,T.E., Woollam,J.A. SPIE-The International Society for Optical Engineering	12 国際会議録 Recent Developments in Spectroscopic Ellipsometry for Materials and Process Control J.N. Hilfiker, B. Johs, J. Hale, C.M. Herzinger, T.E. Tiwald, C.L. Bungay, R.A. Synowicki, G.K. Pribil, J.A. Woollam Society of Vacuum Coaters

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