Carbon-Nitride, Diamond-Like-Carbon and Silicon-Based Films Synthesized by Electron Cyclotron Resonance Chemical Vapor Deposition

Carbon-Nitride, Diamond-Like-Carbon and Silicon-Based Films Synthesized by Electron Cyclotron Resonance Chemical Vapor Deposition

著者名:

掲載資料名:

Properties and processing of vapor-deposited coatings : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

555

発行年:

1999

開始ページ:

353

出版情報:

Warrendale, PA.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994614 [1558994610]

言語:

英語

請求記号:

M23500/555

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017533
シリーズID:	PA00000011
会議名:	Symposium on properties and processing of vapor-deposited coatings
回次:	1998
会議開催地:	Boston, MA, USA
会議開催年:	1998.11.30-1998.12.02

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