Integration Issues for Diamond-Like Carbon in a Copper Damascene Process Flow

Integration Issues for Diamond-Like Carbon in a Copper Damascene Process Flow

著者名:

Grill, A.

掲載資料名:

Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

511

発行年:

1998

開始ページ:

223

出版情報:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994171 [1558994173]

言語:

英語

請求記号:

M23500/511

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017529
シリーズID:	PA00000011
会議名:	Symposium on low-dielectric constant materials
回次:	4th
会議開催地:	San Francisco, CA, USA
会議開催年:	1998.04.14-1998.04.16

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1 国際会議録 Diamondlike Carbon Materials for the BEOL Interlayer Dielectric Applications Grill, A., Jahnes, C., Ott, J., Patel, V., Cohln, S., Hummel, J., Mih, R., Liu, J. Electrochemical Society	7 国際会議録 Diamondlike Carbon Materials as Low-k Dielectrics for Multilevel Interconnects in ULSI Grill, A., Patel, V., Saenger, K. L., Jahnes, C., Cohen, S. A., Schrott, A. G., Edelstein, D. C., Paraszczak, J. R. MRS - Materials Research Society
2 国際会議録 Tribology of Diamond-Like Carbon Coatings for Vacuum and Space Applications Donnet, C., Le Mogne, T., Belin, M., Grill, A., Patel, V., Jahnes, C. Electrochemical Society	8 国際会議録 The Effect of Deposition Conditions on the Optical and Tribological Properties of Annealed Diamond-like Carbon Films Grill A>, Patel V., Meyerson S. B. Plenum Press
3 国際会議録 DIAMOND-LIKE AND NITROGEN DOPED DIAMOND-LIKE CARBON DEPOSITED BY DC PACVD Grill, A., Patel, V. Electrochemical Society	9 国際会議録 Low-Dielectric Constant SiCOH Films as Potential Candidates for Interconnect Dielectrics Cohen, S., Grill, A., Jahnes, C., Patel, V., Perraud, L. Materials Research Society
4 国際会議録 Novel Low-k Dielectrics Based on DLC Materials Grill, A., Patel, V., Jahnes, C. Electrochemical Society	10 国際会議録 Integration of Copper PVD and Electroplating Processes For Damascene Feature Electrofilling Mayer, S., Contolini, R., Jackson, R., Reid, J., Martin, J., Morrissey, D., Schetty, R. Electrochemical Society
5 国際会議録 Electrical and Optical Properties and Applications of Diamond-like Carbon Grill, A. Electrochemical Society	11 国際会議録 Electroplated Damascene Copper: Process Influences on Recrystallization and Texture Gross, M. E., Drese, R., Lingk, C., Brown, W. L., Evans-Lutterodt, K., Barr, D., Golovin, D., Ritzdorf, T., Turner, J., … MRS - Materials Research Society
6 国際会議録 Diamond-like Carbon Coatings for Vacuum and Space Tribology Donnet, Chr., Le Mogne, T., Sicre, J., Grill, A., Patel, V. ESA Publications Division	12 国際会議録 Electroplated Damascene Copper: Process Influences on Recrystallization and Texture Barr, D., Brown, W. L., Drese, R., Evans-Lutterodt, K., Golovin, D., Graham, L., Gross, M. E., Lingk, C., Ritzdorf, T., … Materials Research Society

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