Very Low Surface Roughness in Laser Crystallized Polycrystalline Silicon
- 著者名:
Mourgues, K. Pichon, L. Raoult, F. Mohammed-Brahim, T. Briand, D. Bonnaud, O. Lemoine, D. Boher, P. Sthele, M. Sthele, J. L. - 掲載資料名:
- Flat panel display materials III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 471
- 発行年:
- 1997
- 開始ページ:
- 197
- 出版情報:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993754 [1558993754]
- 言語:
- 英語
- 請求記号:
- M23500/471
- 資料種別:
- 国際会議録
類似資料:
MRS - Materials Research Society |
MRS - Materials Research Society |
Electrochemical Society |
8
国際会議録
Stress Induced during the Solid-Phase Crystallization of Amorphous Silicon Deposited by LPCVD
MRS - Materials Research Society |
Electrochemical Society |
Electrochemical Society |
4
国際会議録
High Performances of Low Temperature (。?00。? Unhydrogenated Polysilicon Thin Film Transistors
MRS - Materials Research Society | |
MRS - Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
Materials Research Society |