Reactive Ion-Beam Etching of GaN Grown by MOVPE
- 著者名:
Saotome, K. Matsutani, A. Shirasawa, T. Mori, M. Honda, T. Sakaguchi, T. Koyama, F. Iga, K. - 掲載資料名:
- III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 449
- 発行年:
- 1997
- 開始ページ:
- 1029
- 出版情報:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993532 [1558993533]
- 言語:
- 英語
- 請求記号:
- M23500/449
- 資料種別:
- 国際会議録
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6
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Deposition of GaN Films on Glass Substrate and Its Application to UV Electroluminescent Devices
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