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Reactive Ion-Beam Etching of GaN Grown by MOVPE

著者名:
Saotome, K.
Matsutani, A.
Shirasawa, T.
Mori, M.
Honda, T.
Sakaguchi, T.
Koyama, F.
Iga, K.
さらに 3 件
掲載資料名:
III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
449
発行年:
1997
開始ページ:
1029
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993532 [1558993533]
言語:
英語
請求記号:
M23500/449
資料種別:
国際会議録

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