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MOVPE GaN Gas-Phase Chemistry for Reactor Design and Optimization

著者名:
Safvi, S. A.
Redwing, J. M.
Thon, A.
Flynn, J. S.
Tischler, M. A.
Kuech, T. F.
さらに 1 件
掲載資料名:
III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
449
発行年:
1997
開始ページ:
101
出版情報:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993532 [1558993533]
言語:
英語
請求記号:
M23500/449
資料種別:
国際会議録

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