Photo-Chemical Etching on Silicon-Carbide by Using KrF Excimer Laser and Xe2* Excimer Lamp
- 著者名:
- 掲載資料名:
- Advanced laser processing of materials - fundamentals and applications : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 397
- 発行年:
- 1996
- 開始ページ:
- 549
- 出版情報:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993006 [1558993002]
- 言語:
- 英語
- 請求記号:
- M23500/397
- 資料種別:
- 国際会議録
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