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EFFECTS OF ANNEALING ON THE STRUCTURE OF Ta2N THIN FILMS DEPOSITED ON Al2O3

著者名:
掲載資料名:
Structure and properties of interfaces in ceramics : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
357
発行年:
1995
開始ページ:
195
出版情報:
Pittsburgh, PA.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992580 [1558992588]
言語:
英語
請求記号:
M23500/357
資料種別:
国際会議録

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