Performance trade-offs for a surface micromachined microengine
- 著者名:
- Miller,S.L. ( Sandia National Labs. )
- Sniegowski,J.J.
- LaVigne,G.
- McWhorter,P.J.
- 掲載資料名:
- Micromachined devices and components II : 14-15 October 1996, Austin, Texas
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2882
- 発行年:
- 1996
- 開始ページ:
- 182
- 終了ページ:
- 191
- 出版情報:
- Bellingham, WA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819422804 [0819422800]
- 言語:
- 英語
- 請求記号:
- P63600/2882
- 資料種別:
- 国際会議録
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