Silicon accelerometers:generic design and operating principles and a case study

Silicon accelerometers:generic design and operating principles and a case study

著者名:: Peeters,E. ( Xerox Wilson Ctr.for Research and Technology )
掲載資料名:: Micromachined devices and components II : 14-15 October 1996, Austin, Texas
シリーズ名:: Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:: 2882
発行年:: 1996
開始ページ:: 134
終了ページ:: 146
出版情報:: Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819422804 [0819422800]
言語:: 英語
請求記号:: P63600/2882
資料種別:: 国際会議録

詳細

TDL書誌ID:	ZA00017495
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachined Devices and Components
回次:	1996 : 2nd
会議開催地:	Austin, TX, USA
会議開催年:	1996.10.14-1996.10.15

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