Applications of bipolar compatible epitaxial polysilicon

Applications of bipolar compatible epitaxial polysilicon

著者名:

Gennissen,P.T.J. ( Delft Univ.of Technology )
French,P.J.

掲載資料名:

Micromachined devices and components II : 14-15 October 1996, Austin, Texas

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2882

発行年:

1996

開始ページ:

59

終了ページ:

65

出版情報:

Bellingham, WA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422804 [0819422800]

言語:

英語

請求記号:

P63600/2882

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017495
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachined Devices and Components
回次:	1996 : 2nd
会議開催地:	Austin, TX, USA
会議開催年:	1996.10.14-1996.10.15

類似資料:

1 国際会議録 Bipolar compatible epitaxial poly for surface-micromachined smart sensors Gennissen,P.T., French,P.J., Bartek,M., Sarro,P.M., Boogaard,A.van der, Visser,C. SPIE-The International Society for Optical Engineering	7 国際会議録 Active interference filters using silicon-compatible materials Poenar,D.P., French,P.J., Wolffenbuttel,R.F. SPIE-The International Society for Optical Engineering
2 国際会議録 Development of silicon accelerometers using epi-micromachining Gennissen,P.T.J., French,P.J. SPIE - The International Society for Optical Engineering	8 国際会議録 Integration of MEMS devices French,P.J. SPIE - The International Society for Optical Engineering
3 国際会議録 New developments in the integration of micromachined sensors Sarro,P.M., French,P.J., Gennissen,P.T.J. SPIE-The International Society for Optical Engineering	9 国際会議録 Integration of MEMS devices French,P.J. SPIE - The International Society for Optical Engineering
4 国際会議録 BuIk-micromachined pressure sensor based on epi-poly techniques Gennissen,P.T.J., Ashruf,C.M.A.., Kaak,M., French,P.J., Sarro,P.M. SPIE-The International Society for Optical Engineering	10 国際会議録 Integration of MEMS devices French,P.J. SPIE - The International Society for Optical Engineering
5 国際会議録 Three-dimensional functional integration in silicon using confined selective epitaxial growth Bartek,M., Gennissen,P.T.J., Wolffenbuttel,R.F. SPIE-The International Society for Optical Engineering	11 国際会議録 Integration of MEMS devices French,P.J. SPIE - The International Society for Optical Engineering
6 国際会議録 New etchant for the fabrication of porous silicon O'Halloran, G.M., Kuhl, M., Sarro, P.M., Gennison, P.T.J., French, P.J. Electrochemical Society	12 国際会議録 Application of time-frequency methods to sound-quality analysis in automobiles French,M., Cohen,L., Loughlin,P.J. SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12