Morphology of silicon wafer surfaces:a comparative study with stomic force microscopy and other techniques

Morphology of silicon wafer surfaces:a comparative study with stomic force microscopy and other techniques

著者名:

Wagner,P. ( Wacker Siltronic AG )
Gerber,H.A.
Graf,D.
Schmolke,R.
Suhren,M.

掲載資料名:

Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2862

発行年:

1996

開始ページ:

18

終了ページ:

27

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422507 [0819422509]

言語:

英語

請求記号:

P63600/2862

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017493
シリーズID:	PA00000029
会議名:	Optics & Photonics : Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays
回次:	1996
会議開催地:	Denver, CO, USA
会議開催年:	1996.08.08-1996.08.09

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