Gas-phase silicon micromachining with xenon difluoride
- 著者名:
Chang,F.I. ( Univ.of California/Los Angeles ) Yeh,R. Lin,G. Chu,P.B. Hoffman,E.J. Kruglick,E.J.J. Pister,K.S.J. Hecht,M.H. - 掲載資料名:
- Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 2641
- 発行年:
- 1995
- 開始ページ:
- 117
- 終了ページ:
- 128
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819420077 [0819420077]
- 言語:
- 英語
- 請求記号:
- P63600/2641
- 資料種別:
- 国際会議録
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