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Silicon nitride and oxide deposited by direct photolysis on sulfur treated GaAs and InP:Application to III-V Passivation

著者名:
Proust,N.
Guillot,E.
Petitjean,M.
Beguet,M.
Chapeaublanc,J.F.
Perrin,J.
さらに 1 件
掲載資料名:
Passivation of metals and semiconductors : proceedings of the Seventh International Symposium on Passivity, Passivation of Metals and Semiconductors, Technical University of Clausthal, Germany, August 21-26, 1994
シリーズ名:
Materials science forum
シリーズ巻号:
185-188
発行年:
1995
開始ページ:
185
終了ページ:
190
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496921 [0878496920]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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