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Passivation of semiconductors by the remote plasma technique

著者名:
掲載資料名:
Passivation of metals and semiconductors : proceedings of the Seventh International Symposium on Passivity, Passivation of Metals and Semiconductors, Technical University of Clausthal, Germany, August 21-26, 1994
シリーズ名:
Materials science forum
シリーズ巻号:
185-188
発行年:
1995
開始ページ:
155
終了ページ:
164
出版情報:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496921 [0878496920]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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