Diamondlike Carbon Applications in Infrared Optics and Microelectronics
- 著者名:
Woollam,J.A. De,B.N. Orzeszko,S. Ianno,N.J. Snyder,P.G. Alterovitz,S.A. Pouch,J.J. Wu,R.L.C. Ingram,D.C. - 掲載資料名:
- Properties and characterization of amorphous carbon films
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 52-53
- 発行年:
- 1990
- 開始ページ:
- 577
- 終了ページ:
- 608
- 出版情報:
- Zurich, Switzerland: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878496044 [0878496041]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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