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Real Time Ellipsometry Characterization and Process Monitoring for Amorphous Carbon Deposition

著者名:
Collins,R.W.  
掲載資料名:
Properties and characterization of amorphous carbon films
シリーズ名:
Materials science forum
シリーズ巻号:
52-53
発行年:
1990
開始ページ:
341
終了ページ:
364
出版情報:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878496044 [0878496041]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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