Application of generalized ellipsometry to complex optical systems

Application of generalized ellipsometry to complex optical systems

著者名:

Schubert,M. ( Univ.of Leipzig(FRG) )
Rheinlander,B. ( Univ.of Leipzig(FRG) )
Woollam,J.A. ( Univ.of Nebraska(USA) )
Johs,B.D. ( J.A.Wooltam Co.(USA) )
Herzinger,C.M. ( J.A.Wooltam Co.(USA) )

掲載資料名:

Polarimetry and ellipsometry : 20-23 May, 1996, Kazimierz Dolny, Poland

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3094

発行年:

1997

開始ページ:

255

終了ページ:

265

出版情報:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819425096 [0819425095]

言語:

英語

請求記号:

P63600/3094

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017410
シリーズID:	PA00000029
会議名:	Polarimetry and Ellipsometry
回次:	1996
会議開催地:	Kazimierz Dolny, Poland
会議開催年:	1996.05.20-1996.05.23

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4 国際会議録 Recent Developments in Spectroscopic Ellipsometry for Materials and Process Control J.N. Hilfiker, B. Johs, J. Hale, C.M. Herzinger, T.E. Tiwald, C.L. Bungay, R.A. Synowicki, G.K. Pribil, J.A. Woollam Society of Vacuum Coaters	10 国際会議録 IR-VUV Dielectric Function of Al1-xInxN Determined by Spectroscopic Ellipsometry Kasic, A., Schubert, M., Rheinlaender, B., Off, J., Scholz, F., Herzinger, C. M. Materials Research Society
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