Routes to failure in rotating MEMS devices experiencing sliding friction

Routes to failure in rotating MEMS devices experiencing sliding friction

著者名:

Miller,S.L. ( Sandia National Labs. )

LaVigne,C. ( Sandia National Labs. )

Rodgers,M.S. ( Sandia National Labs. )

Sniegowski,J.J. ( Sandia National Labs. )

Waters,J.P. ( Sandia National Labs. )

McWhorter,P.J. ( Sandia National Labs. )

さらに 1 件

掲載資料名:

Micromachined Devices and Components III

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3224

発行年:

1997

開始ページ:

24

終了ページ:

30

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426567 [0819426563]

言語:

英語

請求記号:

P63600/3224

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017397
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachined Devices and Components
回次:	1997 : 3rd
会議開催地:	Austin, TX, USA
会議開催年:	1997.09.29

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