First reliability test of a surface-micromachined microengine using SHiMMeR
- 著者名:
- Tanner,D.M. ( Sandia National Labs. )
- Smith,N.F. ( Sandia National Labs. )
- Bowman,D.J. ( Sandia National Labs. )
- Eaton,W.P. ( Sandia National Labs. )
- Peterson,K.A. ( Sandia National Labs. )
- 掲載資料名:
- Micromachined Devices and Components III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3224
- 発行年:
- 1997
- 開始ページ:
- 14
- 終了ページ:
- 23
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426567 [0819426563]
- 言語:
- 英語
- 請求記号:
- P63600/3224
- 資料種別:
- 国際会議録
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