MEMS-based microgratings: preliminary results of novel configurations

MEMS-based microgratings: preliminary results of novel configurations

著者名:

Castracane,J. ( lnterScience,Inc. )
Gutin,M. ( lnterScience,Inc. )

掲載資料名:

Miniaturized Systems with Micro-Optics and Micromechanics III

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3276

発行年:

1998

開始ページ:

196

終了ページ:

206

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427151 [0819427152]

言語:

英語

請求記号:

P63600/3276

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017392
シリーズID:	PA00000029
会議名:	Photonics West : Miniaturized Systems with Micro-Optics and Micromechanics
回次:	1998 : 3rd
会議開催地:	San Jose, CA, USA
会議開催年:	1998.01.26-1998.01.27

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