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Laser micromachining of silicon: a new technique for fabricating terahertz imaging arrays

著者名:
Walker,C.K. ( Steward Observatory/Univ.of Arizona )
Hungerford,A.L. ( Steward Observatory/Univ.of Arizona )
Narayanan,G. ( Steward Observatory/Univ.of Arizona )
Groppi,C. ( Steward Observatory/Univ.of Arizona )
Bloomstein,T.M. ( MIT Lincoln Lab. )
Palmacci,S.T. ( MIT Lincoln Lab. )
Stern,M.B. ( MIT Lincoln Lab. )
Curtin,J.E. ( MIT Lincoln Lab. )
さらに 3 件
掲載資料名:
Advanced technology MMW, radio, and terahertz telescopes : 26-28 March 1998, Kona, Hawaii
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3357
発行年:
1998
開始ページ:
45
終了ページ:
52
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819428042 [0819428043]
言語:
英語
請求記号:
P63600/3357
資料種別:
国際会議録

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