First micromachined silicon load cell for loads up to 1000kg

First micromachined silicon load cell for loads up to 1000kg

著者名:

Wensink,H. ( Univ.of Twente (Netherlands) )
de Boer,M.J. ( Univ.of Twente (Netherlands) )
Wiegerink,R.J. ( Univ.of Twente (Netherlands) )
Zwijze,R.A.F. ( Univ.of Twente (Netherlands) )
Elwenspoek,M.C. ( Univ.of Twente (Netherlands) )

掲載資料名:

Micromachined Devices and Components IV

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3514

発行年:

1998

開始ページ:

424

終了ページ:

430

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429735 [0819429732]

言語:

英語

請求記号:

P63600/3514

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017376
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachined Devices and Components
回次:	1998 : 4th
会議開催地:	Santa Clara, CA, USA
会議開催年:	1998.09.21-1998.09.22

類似資料:

1 国際会議録 High-force 10-kN piezoresistive silicon force sensor with output independent of force distribution Zwijze,R.A.F., Wiegerink,R.J., Krijnen,G.J.M., Berenschot,J.W., Boer,M.J.de, Elwenspoek,M.C. SPIE-The International Society for Optical Engineering	7 国際会議録 Microfuel Cell with a Porous Silicon Nitride Membrane Electrode Assembly Kravitz, S.H., Apblett, C.A., Schmidt, C.F., Beggans, M.H., Ingersoll, D., Shul, R.J., Hecht, A.M. Electrochemical Society
2 国際会議録 Micromachined pipettes integrated in a flow channel for single DNA molecule study by optical trapping Rusu,C.R., Oever,R.van't, Boer,M.J.de, Jansen,H.V., Berenschot,E., Elwenspoek,M.C., Bennink,M.L., Kanger,J.S., … SPIE - The International Society for Optical Engineering	8 国際会議録 Excimer micromachining for texturing silicon solar cells Ortabasi,U., Meier,D.L., Easoz,J.R., Schaeffer,R.D., Stepanova,M.A., Ho,W., Stokes,J.A., Dummer,R.S., Jafolla,J.C., … SPIE-The International Society for Optical Engineering
3 国際会議録 Comb drives: versatile microstructures for capacitive sensing and electrostatic actuation Krijnen, G.J.M., Kuijpers, T., Lammerink, T., Wiegerink, R., Elwenspoek, M. SPIE-The International Society for Optical Engineering	9 国際会議録 Mechanical and structural properties of in-situ doped PECVD silicon carbide layer for post-processing surface micromachining Pham,H.T.M., Boer,C.R.de, Kwakernaak,K., Sloof,W.G., Sarro,P.M. SPIE-The International Society for Optical Engineering
4 国際会議録 New design methodologies in<III>-oriented silicon wafers Oosterbroek,R.E., Berenschot,J.W., Nijdam,A.J., Pandraud,G., Elwenspoek,M.C., Berg,A.van den SPIE - The International Society for Optical Engineering	10 国際会議録 Burn depth determination in human skin using polarization-sensitive optical coherence tomography Pierce, M.C., Sheridan, R.L., Park, B.H., Cense, B., Boer, J.F. SPIE-The International Society for Optical Engineering
5 国際会議録 Characterization of MEMS microgears rotating up to 360,000 rpm by stroboscopic optoelectronic laser interferometry microscope(SOELIM)methodology Brown,G.C., Pryputniewicz,R.J., Boer,M.P.de, Miller,S.L. SPIE - The International Society for Optical Engineering	11 国際会議録 Silicon bulk micromachined vibratory gyroscope for microspacecraft Tang,T.K.T., Gutierrez,R.C., Wilcox,J.Z., Stell,C., Vorperian,V., Dickerson,M., Goldstein,B., Savino,J.L., Li,W.J., … SPIE-The International Society for Optical Engineering
6 国際会議録 Fiber-top micromachined devices D. Iannuzzi, S. de Man, C. J. Alberts, J. W. Berenschot, M. C. Elwenspoek Society of Photo-optical Instrumentation Engineers	12 国際会議録 Reflectivity of micromachined{111}-oriented silicon mirrors for optical input/output couplers Sadler,D.J., Garter,M.J., Ahn,C.H., Koh,S., Cook,A.L. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12