Fabrication of micromachined microwave couplers by CMOS process

Fabrication of micromachined microwave couplers by CMOS process

著者名:

Chang,C. ( National Taiwan Univ. )
Chio,J. ( National Taiwan Univ. )
Yen,K. ( National Taiwan Univ. )
Chang,P. ( National Taiwan Univ. )
Lu,S.-S. ( National Taiwan Univ. )

掲載資料名:

Micromachined Devices and Components IV

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3514

発行年:

1998

開始ページ:

393

終了ページ:

402

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429735 [0819429732]

言語:

英語

請求記号:

P63600/3514

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017376
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Micromachined Devices and Components
回次:	1998 : 4th
会議開催地:	Santa Clara, CA, USA
会議開催年:	1998.09.21-1998.09.22

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