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Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology (Invited Paper)

著者名:
Smith,J.H. ( Sandia National Labs. )
Rodgers,M.S. ( Sandia National Labs. )
Sniegowski,S.L. ( Sandia National Labs. )
Miller,S.L. ( Sandia National Labs. )
Hetherington,D.L. ( Sandia National Labs. )
McWhorter,P.J. ( Sandia National Labs. )
Warren,M.E. ( Sandia National Labs. )
さらに 2 件
掲載資料名:
Micromachined Devices and Components IV
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3514
発行年:
1998
開始ページ:
42
終了ページ:
47
出版情報:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429735 [0819429732]
言語:
英語
請求記号:
P63600/3514
資料種別:
国際会議録

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