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Surface characterization. Weak inversion

著者名:
Merckel G.  
掲載資料名:
Process and device modeling for integrated circuit design : [proceedings of the NATO Advanced Study Institute on Process and device modeling for integrated circuit design, Louvain-la-Neuve, Belgium, July 19-29, 1977]
シリーズ名:
NATO ASI series. Series E, Applied sciences
シリーズ巻号:
21
発行年:
1977
開始ページ:
609
終了ページ:
615
総ページ数:
7
出版情報:
Leyden: Noordhoff International Publishing
ISSN:
0168132X
ISBN:
9789028606678 [902860667X]
言語:
英語
請求記号:
N11482/21
資料種別:
国際会議録

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