Patterning of nickel-titanium SMA films with chemical etching by a novel multicomponent etchant
- 著者名:
Ding,G. ( Shanghai Jiao Tong Univ. ) Yu,A. Zhao,X. Xu,D. Cai,B. Shen,T. - 掲載資料名:
- Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3892
- 発行年:
- 1999
- 開始ページ:
- 340
- 終了ページ:
- 345
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434937 [0819434930]
- 言語:
- 英語
- 請求記号:
- P63600/3892
- 資料種別:
- 国際会議録
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