Ultralow-stress silicon-rich nitride films for microstructure fabrication
- 著者名:
- Cheng,M.-C. ( National Tsing Hua Univ. )
- Ho,W.-G.
- Chang,C.-P.
- Huang,W.-S.
- Huang,R.-S.
- 掲載資料名:
- Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3892
- 発行年:
- 1999
- 開始ページ:
- 152
- 終了ページ:
- 157
- 出版情報:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434937 [0819434930]
- 言語:
- 英語
- 請求記号:
- P63600/3892
- 資料種別:
- 国際会議録
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4
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The Influence of Stress on the Growth of Titanium Silicide Thin Films on (001) Silicon Substrates
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