Temporal characteristic of KrF excimer spectrum generated by discharge exciting without additional fluorine donor
- 著者名:
Li,C. ( Shanxi Univ. ) Xio,L. Jia,S. Ma,S. Hu,T. Zhang,Z. - 掲載資料名:
- 1999 International Conference on Industrial Lasers
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3862
- 発行年:
- 1999
- 開始ページ:
- 110
- 終了ページ:
- 112
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434562 [0819434566]
- 言語:
- 英語
- 請求記号:
- P63600/3862
- 資料種別:
- 国際会議録
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