Stress in dielectric thin films:evolution with annealing and ion implantation

Stress in dielectric thin films:evolution with annealing and ion implantation

著者名:

Mahodaux,C. ( Ecole Nationale Superieure de Physique de Marseille )
Rigneault,H.
Gallais,L.
Gatto,A.
Moretti,P.

掲載資料名:

Advances in Optical Interference Coatings : 25-27 May 1999, Berlin, Germany

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3738

発行年:

1999

開始ページ:

148

終了ページ:

158

出版情報:

Bellingham, WA: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819432124 [0819432121]

言語:

英語

請求記号:

P63600/3738

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017152
シリーズID:	PA00000029
会議名:	SPIE Optical Systems Design : Advances in Optical Interference Coatings
回次:	1999
会議開催地:	Berlin, Germany
会議開催年:	1999.05.25-1999.05.27

類似資料:

1 国際会議録 Mechanical properties of dielectric thin films Rigneault,H., Mahodaux,C., Giovannini,H., Escoubas,L., Moretti,P. SPIE-The International Society for Optical Engineering	7 国際会議録 Comparative study of IR and UV laser damage resistance of silica thin films deposited by electron beam deposition, ion plating, ion assisted deposition and dual … Gallais, L., Krol, H., Capoulade, J., Cathelinaud,M., Roussel, L., Albrand, G., Natoli, J. -Y., Commandre, M., Lequime, … SPIE - The International Society of Optical Engineering
2 国際会議録 Ion implantation in dielectric thin films for passive and active components (Invited Paper) Flory,F., Roux,L., Tisserand,S., Rigneault,H., Robert,S., Mathieu,G. SPIE-The International Society for Optical Engineering	8 国際会議録 THE ASPECTS OF THERMAL ANNEAL TO INTRINSIC STRESS AND MICROSTRUCTURE OF MULTILAYER THIN FILMS Yang, C. H., Chen, P. C. Materials Research Society
3 国際会議録 Spontaneous emission of rare-earth ions confined in planar multilayer dielectric microcavities Rigneault,H., Robert,S., Amra,C., Lamarque,F., Monneret,S., Jacquier,B., Moretti,P., Jurdyc,A.M., Belarouci,A. SPIE-The International Society for Optical Engineering	9 国際会議録 Spontaneous emission modifications in planar microcavities:application to autofluorescence control for thin films under UV irradiation Rigneault,H., Begon,C., Nuti,D., Bois,E. SPIE - The International Society for Optical Engineering
4 国際会議録 Optical Properties of Dielectric Microcavities Implanted with Rare Earth Atoms Rigneault,H., Jacquier,B., Moretti,P., Jurdyc,A.M., Belarouci,A., Auffret,A., Robert,S. Trans Tech Publications	10 国際会議録 Optical microcavities based on F2 color centers in lithium fluoride films: modification of spontaneous emission Bonfigli, F., Jacquier, B., Montereali, R., Moretti, P., Nichelatti, E., Piccinini, M., Rigneault, H., Somma, F. SPIE-The International Society for Optical Engineering
5 国際会議録 ION IMPLANTATION AND ANNEALING OF OXIDES White, C.W., Boatner, L.A., Skland, P.S., McHargue, C.J., Pennycook, S.J., Aziz, M.J., Farlow, G.C., Rankin, J. Materials Research Society	11 国際会議録 ION IMPLANTATION AND ANNEALING OF CRYSTALLINE OXIDES White, C.W., Sklad, P.S., Boatner, L.A., Farlow, G.C., McHargue, C.J., Sales, B.C., Aziz, M.J. Materials Research Society
6 国際会議録 SELF ANNEALING ION IMPLANTATION IN THIN SILICON FILMS Rubio, J.D., Vijay, R.P., Hart, R.R. Materials Research Society	12 国際会議録 New process for manufacturing thin SiGe and SiGeC epitaxial films on silicon by ion implantation and excimer laser annealing Boher,P., Stehle,J.L.P., Piel,J.P., Fogarassy,E. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12