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MEMS-IDT-based accelerometers and gyroscopes

著者名:
Varadan,V.K. ( The Pennsylvania State Univ. )
Xavier,P.
Varadan,V.V.
Suh,D.
Atashbar,M.Z.
Jose,K.A.
さらに 1 件
掲載資料名:
Smart structures and materials 1999 : smart electronics and MEMS : 1-3 March, 1999, Newport Beach, California
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3673
発行年:
1999
開始ページ:
182
終了ページ:
189
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431479 [0819431478]
言語:
英語
請求記号:
P63600/3673
資料種別:
国際会議録

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