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Reactive pulsed laser deposition assisted by rf discgarge plasma

著者名:
掲載資料名:
High-power laser ablation III, 24-28 April 2000, Santa Fe, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
4065
発行年:
2000
開始ページ:
242
終了ページ:
248
出版情報:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437006 [081943700X]
言語:
英語
請求記号:
P63600/4065
資料種別:
国際会議録

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