Swift Heavy Ion Induced Recrystallization Studies of Top Silicon Layer on Silicon-on-Insulator(SOI)Structure by Atomic Force Microscopy

Swift Heavy Ion Induced Recrystallization Studies of Top Silicon Layer on Silicon-on-Insulator(SOI)Structure by Atomic Force Microscopy

著者名:

Singh,Rajendra

掲載資料名:

Proceedings of the Tenth International Workshop on the Physics of Semiconductor Devices (December 14-18, 1999)

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

3975

発行年:

2000

巻:

Part2

開始ページ:

904

終了ページ:

907

出版情報:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819436016 [0819436011]

言語:

英語

請求記号:

P63600/3975

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017117
シリーズID:	PA00000029
会議名:	International Workshop on the Physics of Semiconductor Devices
回次:	1999 : 10th
会議開催地:	Delhi, India
会議開催年:	1999.12.14-1999.12.18

類似資料:

1 国際会議録 Ion Beam Analysis and Applications in On-Line Monitoring of Ion Induced Modifications of Materials Avasthi,D.K. Trans Tech Publications	7 国際会議録 Ion Beam Techniques for Study of Diffusion Avasthi,D.K., Tripathi,A. Trans Tech Publications
2 国際会議録 Nanolithography of polymer surfaces by Atomic Force Microscopy Blach, J.A., Watson, G.S., Brown, C.L., Pham, D.K., Wright, J.P., Nicolau, D.V., Myhra, S. SPIE-The International Society for Optical Engineering	8 国際会議録 Effect of gamma ray and high-energy oxygen ion radiation on electrical and optical properties of MCT epitaxial layers Sitharaman,S., Kanjilal,D., Arora,S.K., Ganguly,S.K., Nagpal,A., Gautam,M., Raman,R., Kumar,S., Prakash,V.R., Gupta,S.C. SPIE - The International Society for Optical Engineering
3 国際会議録 Growth of Submicron Heavily Doped Silicon Layers on Lightly Doped Silicon by RPCVD Arora,R.S., Venkateswaran,R., Haldar,T., Gupta,S.K., Kumar,Praveen, Kesavan,R. SPIE-The International Society for Optical Engineering, Narosa	9 国際会議録 Silicon on Insulator Technology by Ion Implantation and Smart-Cut Dutt, M.B., Kumar, Rajendra, Datta, P., Chowdhury, S.P., Singh, Sube, Gupta, A.P., Gopal, Vishun SPIE-The International Society for Optical Engineering
4 国際会議録 Au Ion Induced Modification of C60 Thin Film Samples Bajwa, Navdeep, Ingale, Alka, Avasthi, D. K., Kumar, Ravi, Tripathi, A., Dharamvir, K., Jindal, V. K., Schmitt, Michael, … Materials Research Society	10 国際会議録 Study of Damaged Top Layers of Silicon Crystals Produced by BF2+ Implantation by High Resolution X-ray Diffraction Lal,Krishan, Bhagavannarayana,G., Virdi,G.S. SPIE-The International Society for Optical Engineering, Narosa
5 国際会議録 Screen Printed Titanium Di-oxide Antireflection Coating on Silicon Solar Cells Kishore,Ram, Kumar,Ravi, Arora,N.K., Singh,S.N. SPIE-The International Society for Optical Engineering, Narosa	11 国際会議録 Effect of Heavy Ion Irradiation on Non-Linear Properties of Organic Crystals Aithal,P.Sreeramana, Rao,P.Mohan, Avasthi,D.K. Trans Tech Publications
6 国際会議録 ATOMIC FORCE MICROSCOPY OF THE {100} SURFACE OF FLAME SYNTHESIZED DIAMOND Ravi, K.V., Oden, P.I., Yaniv, D. Electrochemical Society	12 国際会議録 Stress-induced birefringence in silicon-on-insulator (SOI) waveguides Ye, W.N., Xu, D.-X., Janz, S., Cheben, P., Delage, A., Picard, M.-J., Lamontagne, B., Tarr, N.G. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12