Blank Cover Image

NO/O2/NO Plasma Grown Oxynitride Films on Silicon

著者名:
掲載資料名:
Proceedings of the Tenth International Workshop on the Physics of Semiconductor Devices (December 14-18, 1999)
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
3975
発行年:
2000
巻:
Part1
開始ページ:
411
終了ページ:
414
出版情報:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436016 [0819436011]
言語:
英語
請求記号:
P63600/3975
資料種別:
国際会議録

類似資料:

1 国際会議録 Structural and Electrical Characterizations of Oxynitride Films on Solid Phase Epitaxially Grown Silicon Carbide

Bera, L.K., Choi, W.K., McNeill, D., Ray, S.K., Chatterjee, S., Maiti, C.K.

Materials Research Society
7 国際会議録 Silicon Heterostructure Field Effect Transistors : Status and Trends

Maiti, C.K.

SPIE-The International Society for Optical Engineering
2 国際会議録 Deposition of Stoichiometric SiO2 on Silicon-Germanium Strained Layers

Senapati,B., Maikap,S., Bera,L.K., Maiti,C.K.

SPIE - The International Society for Optical Engineering
8 国際会議録 Plasma Grown Gate Oxides on Tensile- Strained Si1-yCy/ Si Heterostructure

Mahapatra, R., Maikap, S., Kar, G.S., Ray, S.K.

SPIE-The International Society for Optical Engineering
3 国際会議録 Microwave Plasma Oxidation of Strain-Compensated Si1-x-yGexCy Films

Ray,S.K., Bera,L.K., John,S., Banerjee,S.K., Maiti,C.K.

Narosa Publishing House
9 国際会議録 Electrical Properties of Ultrathin Stacked SiO2/ZrO2 Gate Dielectrics

Chatterjee, S., Samanta, S.K., Banerjee, H.D., Maiti, C.K.

SPIE-The International Society for Optical Engineering
4 国際会議録 Oxidation Studies on Strained SiGe Layer Using Microwave Oxygen Plasma

Mukhopadhyay,M., Ray,S.K., Maiti,C.K.

SPIE-The International Society for Optical Engineering, Narosa
10 国際会議録 Dielectric Relaxation and Defect Generation Under Pulsed and Constant Voltage Stressing of Ultrathin TiO2 Films on …

M.K. Bera, S. Saha, C.K. Maiti

Electrochemical Society
5 国際会議録 Properties of Plasma Oxynitride Films on Strained SiGe

Mukhopadhyay, M., Bera, L. K., Ray, S. K., Maiti, C. K.

MRS - Materials Research Society
11 国際会議録 Schottky Barrier Heights of Au on Strained Layer Si1-xGex Films

Bera,L.K., Maiti,C.K., Dutta,A., Mukhopadhyay,M., Ray,S.K., Lahiri,S.K.

SPIE-The International Society for Optical Engineering, Narosa
6 国際会議録 Low Temperature Oxidation of Strained-Si in Microwave Plasma

Bera,L.K., Ray,S.K., Banerjee,H.D., Maiti,C.K.

Narosa Publishing House
12 国際会議録 Temperature Dependence of Electrical Properities of Ultrathin Nitrided Oxide Grown on Strained-SiGe by Rapid Thermal Oxidation

Samanta, S.K., Chatterjee, S., Bera, L.K., Banerjee, H.D., Maiti, C.K.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12