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Synchrotron radiation X-ray microdiffraction study of Cu interconnects

著者名:
Zhang, X.
Solak, H.
Cerrina, F.
Lai, B.
Cai, Z.
Ilinski, P.
Legnini, D.
Rodrigues, W.
さらに 3 件
掲載資料名:
Applications of synchrotron radiation techniques to materials science V : sympoisum held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
590
発行年:
2000
開始ページ:
259
出版情報:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994980 [155899498X]
言語:
英語
請求記号:
M23500/590
資料種別:
国際会議録

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