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Study of RF-Sputtered Ba(ZrxTi1-x)O3 Thin Films for ULSI DRAM Application

著者名:
Lee, J-H.
Chen, T-S.
Balu, V.
Han, J.
Mohammedali, R.
Gopalan, S.
Wong, C-H.
Lee, J. C.
さらに 3 件
掲載資料名:
Ferroelectric thin films VII : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
541
発行年:
1999
開始ページ:
47
出版情報:
Warrendale, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994478 [1558994475]
言語:
英語
請求記号:
M23500/541
資料種別:
国際会議録

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