Discovery of Long-Range Order in Thin (2-20 nm) SiO2 Films by Ion-Beam Analysis
- 著者名:
Herbots, N. Atluri, V. Hurst, Q. B. Shaw, J. M. Banerjee, S. Bradley, J. D. Culbertson, R. J. Smith, D. J. - 掲載資料名:
- Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 510
- 発行年:
- 1998
- 開始ページ:
- 137
- 出版情報:
- Warrendale, Pa: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994164 [1558994165]
- 言語:
- 英語
- 請求記号:
- M23500/510
- 資料種別:
- 国際会議録
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