Optimal Design of Stagnation-Flow MOVPE Reactors with Axisymmetric Multi-Aperture Inlets

Optimal Design of Stagnation-Flow MOVPE Reactors with Axisymmetric Multi-Aperture Inlets

著者名:

掲載資料名:

Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

490

発行年:

1998

開始ページ:

161

出版情報:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993952 [1558993959]

言語:

英語

請求記号:

M23500/490

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017060
シリーズID:	PA00000011
会議名:	Symposium on semiconductor process and device performance modelling
回次:	1997
会議開催地:	Boston, MA, USA
会議開催年:	1997.12.02-1997.12.03

類似資料:

1 国際会議録 Optimal Design of Gas Inlets for Stagnation Flow MOVPE Reactors Gupta, V., Theodoropoulos, C., Peck, J.D., Mountziaris, T.J. Electrochemical Society	7 国際会議録 Development and Testing of a Counterflow let Reactor for Kinetic Studies related to Vapor Phase Synthesis of Electronic Materials Mountziaris, T. J., Pawlowski, Roger P., Peck, John D, Sarigiannis, Demetrius American Institute of Chemical Engineers
2 国際会議録 Robust Reaction-Transport Models of MOVPE Reactors Theodoropoulos, C., Moffat, H. K., Mountziaris, T. J. MRS - Materials Research Society	8 国際会議録 A Scaleable Stagnation-Flow Reactor for Combustion Synthesis of Diamond Hahn, D.W., Edwards, C.F., McCarty, K.F., Kee, R.J. Electrochemical Society
3 国際会議録 Optimal design of reactors for metalorganic vapor phase epitaxy of group III nitrides Pawlowski, R. P., Theodoropoulos, C., Mountziaris, T. J., Moffat, H. K., Han, J., Thrush, E. J. MRS-Materials Research Society	9 国際会議録 KINETICS OF LOW-PRESSURE MOCVD OF GaAs FROM TRIETHYL-GALLIUM AND ARSINE Ingle, N. K., Theodoropoulos, C., Mountziaris, T. J., Wexler, R. M., Smith, F. T. J. MRS - Materials Research Society
4 国際会議録 Studies of Stagnation Flow Patterns Formed by Two Counterflowing, Non-isothermal Jets Mountziaris, T. J., Pawlowski, Roger P., Peck, John D., Sarigiannis, Demetrius American Institute of Chemical Engineers	10 国際会議録 (435b) Toward Optimal Design of Compound Semiconductor Nanocrystals: First-Principles Analysis, Monte Carlo Simulations, and Experimental Synthesis and … Sumeet C. Pandey, Tejinder Singh, T. J. Mountziaris, Dimitrios Maroudas American Institute of Chemical Engineers
5 国際会議録 Vapor phase synthesis of II-IV semiconductor nanoparticles in a counterflow jet reactor Sarigiannis, D., Peck, J. D., Mountziaris, T. J., Kioseoglou, G., Petrou, A. MRS-Materials Research Society	11 国際会議録 Generalized Design Criteria for Vertical Chemical Vapor Deposition Reactors Joungmo Cho, T.J. Mountziaris American Institute of Chemical Engineers
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