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Cross-Sectional TEM Sample Preparation Method Using FIB Etching for Thin-Film Transistor

著者名:
Tsujimoto, K.
Tsuji, S.
Takatsuji, H.
Kuroda, K.
Saka, H.
Miura, N.
さらに 1 件
掲載資料名:
Specimen preparation for transmission electron microscopy of materials IV : symposium held April 2, 1997, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
480
発行年:
1997
開始ページ:
207
出版情報:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993846 [1558993843]
言語:
英語
請求記号:
M23500/480
資料種別:
国際会議録

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