The Formation of TiN-Encapsulated Silver Films by Nitridation of Silver-Refractory Metal Alloys in NH3

The Formation of TiN-Encapsulated Silver Films by Nitridation of Silver-Refractory Metal Alloys in NH3

著者名:

Adams, Daniel

掲載資料名:

Advanced metallization for future ULSI : symposium held April 8-11, 1996, San Francisco, California, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

427

発行年:

1996

開始ページ:

337

出版情報:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993303 [1558993304]

言語:

英語

請求記号:

M23500/427

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017054
シリーズID:	PA00000011
会議名:	Symposium on advanced metallization for future ulsi
回次:	1996
会議開催地:	San Francisco, CA, USA
会議開催年:	1996.04.08-1996.04.11

類似資料:

1 国際会議録 Encapsulation of Silver Via Nitridation of Ag/Ti Bilayer Structures Zou, Y. L., Alford, T. L., Adams, D., Laursen, T., Tu, K.-N., Morton, R., Lau, S. S. MRS - Materials Research Society	7 国際会議録 ENHANCED ADHESION OF COPPER FILMS TO SiO2, PSG AND BPSG BY REFRACTORY METAL ADDITIONS Rafalski, S. A., Spreitzer, R. L., Russell, S. W., Alford, T. L., Li, J., Moinpour, M., Moghadam, F., Mayer, J. W. MRS - Materials Research Society
2 国際会議録 Influence of Underlayer and Encapsulation Process on Texture in Polycrystalline Silver Thin Films Zeng, Yuxiao, Zou, Y. L., Alford, T. L., Deng, F., Lau, S. S., Laursen, T., Ullrich, B. Manfred MRS - Materials Research Society	8 国際会議録 Cobalt and Titanium Metallization of SiGeC for Shallow Contacts Bair, A. E., Alford, T. L., Atzmon, Z., Marcus, S. D., Doller, D. C., Morton, R., Lau, S. S., Mayer, J. W. MRS - Materials Research Society
3 国際会議録 Analysis of Residual Stress in Polycrystalline Silver Thin Films by X-ray Diffraction Alford, T. L., Zeng, Yuxiao, Zou, Y. L., Deng, F., Lau, S. S., Laursen, T., Ullrich, B. Manfred MRS - Materials Research Society	9 国際会議録 EFFECTIVENESS OF NITRIDE DIFFUSION BARRIERS IN A SELF-ENCAPSULATED COPPER-BASED METALLIZATION Adams, D., Spreitzer, R. L., Russell, S. W., Theodore, N. D., Alford, T. L., Mayer, J. W. MRS - Materials Research Society
4 国際会議録 INTERFACIAL REACTIONS OF COPPER / REFRACTORY ALLOY AND BILAYER FILMS ON SiO2 Spreitzer, R. L., Rafalski, S. A., Adams, D., Russell, S. W., Atzmon, Z., Li, J., Alford, T. L., Mayer, J. W. MRS - Materials Research Society	10 国際会議録 INVESTIGATION OF CHROMIUM NITRIDATION USING ION BEAM RESONANCE ANALYSIS Russell, S. W., Bair, A. E., Rack, M. J., Adams, D., Spreitzer, R. L., Alford, T. L., Culbertson, R. J. MRS - Materials Research Society
5 国際会議録 Indluence of Interfacial Copper on the Ti-SiO2 Reaction during Nitridatin of Cu-Ti Films Adams, Daniel, Alford, T. L., Theodore, N. D., Laursen, T., Russell, S. W., Kim, M. J. MRS - Materials Research Society	11 国際会議録 A Study of Tungsten-Titanium Barriers in Silver Metallization S. Bhagat, N.D. Theodore, T.L. Alford Materials Research Society
6 国際会議録 Formation Of AlxOyNzBarriers For Advanced Silver Metallization Wang, Y., Alford, T.L. Materials Research Society	12 国際会議録 TEM Observations of Ag-Ti Bilayers After Thermal Aging Treatment in a Reducing Ambient Amali, Adam I., Mayer, J. W., Zeng, Yuxiao, Zou, Y. L., Alford, T. L., Deng, F., Lau, S. S. MRS - Materials Research Society

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