Growth of Tin Oxide Film Deposited by a Hybrid Ion Beam

Growth of Tin Oxide Film Deposited by a Hybrid Ion Beam

著者名:

Choi, W. K.

掲載資料名:

Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

396

発行年:

1996

開始ページ:

611

出版情報:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992993 [1558992995]

言語:

英語

請求記号:

M23500/396

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017051
シリーズID:	PA00000011
会議名:	Symposium on ion-solid interactions for materials modification and processing
回次:	1995
会議開催地:	Boston, MA, USA
会議開催年:	1995.11.27-1995.12.01

類似資料:

1 国際会議録 Preparation and Characterization of Tin Oxide Films by Ion-Assisted Deposition Choi, W-K., Cho, J-S., Song, S. K., Kim, Y. T., Yoon, K. H., Jung, H-J., Koh, S-K. MRS - Materials Research Society	7 国際会議録 Surface Modification of Polymer by Ion-Assisted Reaction in Reactive Gases Environment Koh, S-K., Choi, S. C., Choi, W-K., Jung, H-J., Hur, H. H. MRS - Materials Research Society
2 国際会議録 Crystalline Structure and Composition of Tin Oxide Film Grown by Reactive Ion Assisted Deposition as a Function of Average Irradiating Energy Choi, W. K., Song, S. K., Cho, J. S., Jung, H. -J., Koh, S. K. MRS - Materials Research Society	8 国際会議録 Enhancement of Adhesion Between Cu Thin Film and Polyimide Modified by Ion Assisted Reaction Choi, S. C., Kim, K. H., Jung, H-J., Whang, C. N., Koh, S. K. MRS - Materials Research Society
3 国際会議録 Thermal Stability of Cu Films on TiN/Ti/Si(100) by Partially Ionized Beam Deposition Jang, H. G., Kim, K. H., Choi, D. J., Han, S., Choi, S. C., Choi, W-K., Jung, H-J., Koh, S-K. MRS - Materials Research Society	9 国際会議録 XPS AND FTIR STUDY OF THE THIN POLYIMIDE FILMS FABRICATED BY IONIZED CLUSTER BEAM DEPOSITION Kim, K. W., Chae, K. H., Choi, S. C., Cho, S. J., Vahe, Y. W., Whang, C. N., Jung, H. J., Lee, D. H., Lee, J. K. Materials Research Society
4 国際会議録 Thermal Stability of Cu Films on TiN/Ti/Si(100) by Partially Ionized Beam Deposition Jang, H. G., Kim, K. H., Choi, D. J., Han, S., Choi, S. C., Choi, W. K., Jung, H-J., Koh, S. K. MRS - Materials Research Society	10 国際会議録 Electrical Resistivity of Copper Films by Partially Ionized Beam Deposition Han, S., Yoon, K. H., Kim, K. H., Jang, H. G., Choi, S. C., Jung, H-J., Koh, S-K. MRS - Materials Research Society
5 国際会議録 Effect of Ion Energy on Structural and Chemical Properties of Tin Oxide Film in Reactive Ion-Assisted Deposition (R-IAD) Cho, Jun-Sik, Choi, Won-Kook, Yoon, Ki Hyun, Cho, J., Yoon, Young-Soo, Jung, Hyung-Jin, Koh, Seok-Keun MRS - Materials Research Society	11 国際会議録 Electrical Resistivity of Copper Films by Partially Ionized Beam Deposition Han, S., Yoon, K. H., Kim, K. H., Jang, H. G., Choi, S. C., Jung, H-J., Koh, S. K. MRS - Materials Research Society
6 国際会議録 Characteristics of ethylene polymerization catalyzed over ziegler-natta/metallocene hybrid catalysts: Comparison between silica-based and magnesium-based … Cho, H. S., Choi, D. J., Song, I. K., Lee, W. Y. Elsevier	12 国際会議録 Characterization of modified surface of indium tin oxide film during process of laser patterning Zeng,J.N., Koh,H.L., Ren,Z.M., Song,W.D., Lu,Y.F. SPIE-The International Society for Optical Engineering

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