An Apparatus for Magnetron Sputter Coating and Plasma Immersion Ion Implantation
- 著者名:
Ensinger, W. Hartmann, J. Klein, J. Usedom, P. Stritzker, B. Rauschenbach, B. - 掲載資料名:
- Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 396
- 発行年:
- 1996
- 開始ページ:
- 521
- 出版情報:
- Pittsburgh: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992993 [1558992995]
- 言語:
- 英語
- 請求記号:
- M23500/396
- 資料種別:
- 国際会議録
類似資料:
Materials Research Society | |
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
9
国際会議録
Deposition of Pb(Zr,Ti)O3-Films on High-Grade Steel Hastelloy and Modification by Ion Implantation
MRS - Materials Research Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |