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New Developments in Metal Ion Implantation by Vacuum Arc Ion Sources and Metal Plasma Immersion

著者名:
Brown, I. G.
Anders, A.
Anders, S.
Dickinson, M. R.
MacGill, R. A.
Monteiro, O. R.
Oks, E. M.
Raoux, S.
Wang, Z.
Yushkov, G.
さらに 5 件
掲載資料名:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
396
発行年:
1996
開始ページ:
467
出版情報:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992993 [1558992995]
言語:
英語
請求記号:
M23500/396
資料種別:
国際会議録

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