Blank Cover Image

Study of Diamond Nucleation on Silicon Using Direct Negative Carbon Ion Beam Source

著者名:
掲載資料名:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
396
発行年:
1996
開始ページ:
221
出版情報:
Pittsburgh: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992993 [1558992995]
言語:
英語
請求記号:
M23500/396
資料種別:
国際会議録

類似資料:

1 国際会議録 A Novel Rectilinear Negative Carbon Ion Beam Source for Large-Area Amorphous Diamond Like Carbon Coatings

Sohn, M. H., Ahn, Y. O., Ko, Y. W., Park, Y., Kim, S. I.

MRS - Materials Research Society
7 国際会議録 Application of chemically amplified resist to 10-keV e-beam system

Ahn,S., Kim,C., Yang,S.-H., Moon,S.-Y., Choi,S.-W., Han,W.-S., Sohn,J.-M.

SPIE-The International Society for Optical Engineering
2 国際会議録 Design of a Compact Negative Metal Ion Beam Source for Surface Studies

Park, Y., Ko, Y. W., Sohn, M. H., Kim, S. I.

MRS - Materials Research Society
8 国際会議録 Dust Removal Using Electrode-Plates Coated with Activated Carbon

T.W. Jun, H.C. Park, K.H. Ahn, M. Sajjad, K.S. Kim

Trans Tech Publications
3 国際会議録 Growth of Low-Temperature Polycrystalline Si Film by Direct Negative Si Ion Beams

Sohn, M. H., Kim, D., Ahn, Y. O., Kim, S. I.

MRS - Materials Research Society
9 国際会議録 Inhibition Mechanism of Magnesium Ion on Carbonation Reaction with Ca(OH)2 and CO2

Kim, J.H., Ahn, J.W., Ko, S.J., Park, W.K., Han, C.

Trans Tech Publications
4 国際会議録 Carbon Nitride Formation by Plasma Assisted Ion Beam Deposition

Tompa, G. S., Murzin, I. H., Kim, S. I., Ahn, Y. O., Gallois, B., Fischer, T. E., Forsythe, E. W.

MRS - Materials Research Society
10 国際会議録 Fast Inspection of Non-Visual Defects in the Wafer Surface Using Two Low-Energy E-Beam Sources

S.J. Ahn, T.S. Oh, D.W. Kim, H.S. Kim

Trans Tech Publications
5 国際会議録 *Field emission from carbon films deposited by controlled-low-energy beams and CVD sources

Lowndes, Douglas H., Merkulov, Vladimir I., Baylor, L. R., Jellison, G. E. Jr., Poker, D. B., Kim, S., Sohn, M. H., …

MRS-Materials Research Society
11 国際会議録 Effect of Diamond-Like Carbon Overcoats on VOR Performance

Lee, J.-W, Kim, S.H., Park, Y.S., Shinn, M.N., Kang, D.H., Voon, S.Y, Kim, D.S., Park, T.S., Ha, S.H., Lee, J.-H., Kim, …

Electrochemical Society
6 国際会議録 Study of the beam blur and its effect on the future mask fabrication [6349-33]

Lee, S., Park, S., Ahn, M., Doh, J., Kim, S., Kim, B., Choi, S., Han, W.

SPIE - The International Society of Optical Engineering
12 国際会議録 Carbon Nitride Films Formed Using Sputtering and Negative Carbon Ion Sources

Murzin, I. H., Tompa, G. S., Wei, J., Muratov, V., Fischer, T. E., Yakovlev, V.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12