Optical methods for characterization of MEMS device motion

Optical methods for characterization of MEMS device motion

著者名:

Nelson,P.R. ( Univ.of California/Los Angeles )
Chu,P.B.
Pister,K.S.J.

掲載資料名:

Microlithography and Metrology in Micromachining

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

2640

発行年:

1995

開始ページ:

53

終了ページ:

57

出版情報:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819420060 [0819420069]

言語:

英語

請求記号:

P63600/2640

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00017004
シリーズID:	PA00000029
会議名:	Micromachining and Microfabrication : Microlithography and Metrology in Micromachining
回次:	1995
会議開催地:	Austin, TX, USA
会議開催年:	1995.10.23-1995.10.24

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