Relation between Minute Lattice Strain and Anonmalous Oxygen Precipitation in a Czochralski-Grown Silicon Crystal

Relation between Minute Lattice Strain and Anonmalous Oxygen Precipitation in a Czochralski-Grown Silicon Crystal

著者名:

掲載資料名:

Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995

シリーズ名:

Materials science forum

シリーズ巻号:

196-201

発行年:

1995

パート:

4

開始ページ:

1743

終了ページ:

1748

出版情報:

Zurich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878497164 [0878497161]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00020219
シリーズID:	PA00000012
会議名:	International Conference on Defects in Semiconductors : ICDS
回次:	18th
会議開催地:	Sendai, Japan
会議開催年:	1995.07.23-1995.07.28

類似資料:

1 国際会議録 OXYGEN PRECIPITATION BEHAVIOR IN SILICON DURING CZOCHRALSKI CRYSTAL GROWTH Hourai, M., Nagashima, T., Kajita, E., Miki, S., Sumita, S., Sano, M., Shigematsu, T. Electrochemical Society	7 国際会議録 Growth Parameters Determining the Type of Grown-in Defects in Czochralski Silicon Crystals Hourai,M., Kajita,E., Nagashima,T., Fujiwara,H., Sadamitsu,S., Miki,S., Shigematsu,T. Trans Tech Publications
2 国際会議録 ENHANCEMENT OF OXYGEN PRECIPITATION IN QUENCHED CZOCHRALSKI SILICON CRYSTALS Hara, A, Fukuda, T., Hirai, I., Ohsawa, A. Materials Research Society	8 国際会議録 Effects of Light Element Impurities on the Formation of Grown-in Defects Free Region of Czochralski Silicon Single Crystal lida, M., Kusaki, W., Tamatsuka, M., lino, E., Kimura, M., Muraoka, S. Electrochemical Society
3 国際会議録 Photoluminescence of Ring-Distribution of Oxygen Precipitates in Czochralski Silicon Terashima,K., Ikarashi,T., Ono,H., Tajima,M. Trans Tech Publications	9 国際会議録 Effects of Growth Parameters on the Defects Formation in the Czochralski Grown Silicon Crystal Kim, Y., Ha, T.S., Yoon, J.K. Electrochemical Society
4 国際会議録 Formation Behaviour of Grown-in Defects in Silicon During Czochralski Crystal Growth Saishoji, T., Nakamura, K., Nakajima, H., Yokoyama, T., Ishikawa, F., Tomioka, J. Electrochemical Society	10 国際会議録 INVITED: NATURE AND GENERATION OF GROWN-IN DEFECTS IN CZOCHRALSKI SILICON CRYSTALS Hourai, M., Nishikawa, H., Tanaka, T., Umeno, S., Asayama, E., Nomachi, T., Kelly, G. Electrochemical Society
5 国際会議録 Control of Grown-in Defects in Czochralski Silicon Crystals Hourai, M., Kelly, G.P., Tanaka, T., Umeno, S., Ogushi, S. Electrochemical Society	11 国際会議録 *PRECIPITATION OF OXYGEN AND THE MECHANISH OF STACKING FAULT FORMATION IN CZOCHRALSKI SILICON BULK CRYSTALS, Wada, K., Inoue, N., Osaka, J. North-Holland
6 国際会議録 Correlations between TD Annihilation and Oxygen Precipitation in Czochralski-Grown Silicon Reiche,M., Reichel,J. Trans Tech Publications	12 国際会議録 EFFECTS OF LAMP PULSES ON THE OXYGEN-PRECIPITATION-GETTERING OF Cr IN CZOCHRALSKI GROWN Si Chabane-Sari, N.-E, Krieger-Kaddour, S., Vinante, C., Barbier, D. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12