Engineering tool set for monolithic and hybrid microsystem design
- 著者名:
Boutamine,H. ( Techniques of Informatics and Microelectronics for Computer Architecture (France ) Karam,J.M. ( Techniques of Informatics and Microelectronics for Computer Architecture (France ) Courtois,B. ( Techniques of Informatics and Microelectronics for Computer Architecture (France ) Drake,P. ( Mentor Graphics ) Oudinot,J. ( Mentor Graphics ) El Tahawi,H. ( Mentor Graphics ) Cao,A. ( Mentor Graphics ) Rencz,M. ( Technical Univ.of Budapest (Hungary) ) Poppe,A. ( Technical Univ.of Budapest (Hungary) ) Szekely,V. ( Technical Univ.of Budapest (Hungary) ) - 掲載資料名:
- Microlithography and Metrology in Micromachining III
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3225
- 発行年:
- 1997
- 開始ページ:
- 76
- 終了ページ:
- 84
- 出版情報:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426574 [0819426571]
- 言語:
- 英語
- 請求記号:
- P63600/3225
- 資料種別:
- 国際会議録
類似資料:
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |