Amorphous Silicon Nitrogen Alloys Deposited by PECVD under Hydrogen Dilution Conditions
- 著者名:
Rava,P. Giuliani,F. Giorgis,F. Pirri,C.F. Tresso,E. Mandracci,P. Summonte,C. Rizzoli,R. Desalvo,A. - 掲載資料名:
- Physics of - Semiconductor Devices -
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 3316
- 発行年:
- 1998
- 巻:
- Part 1
- 開始ページ:
- 580
- 終了ページ:
- 583
- 出版情報:
- New Delhi: Narosa Publishing House
- ISSN:
- 0277786X
- ISBN:
- 9780819427564 [081942756X]
- 言語:
- 英語
- 請求記号:
- P63600/3316
- 資料種別:
- 国際会議録
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